- Vacuum transfer
- SEMI certified
- High reliability
- Substrate handling
- Vacuum chambers
- Transfer modules
Description
The SIASUN SRBZ820C Vacuum Transfer Robot operates in semiconductor- and vacuum-process automation. Works inside or adjacent to vacuum chambers and transfer modules to move sensitive substrates.
Commonly characterized as a SEMI-certified solution with high reliability for wafer handling.
The SRBZ820C serves semiconductor, inspection, and industrial vacuum transfer applications.
Contact for pricing and availability.
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Specs
Industries
SIASUN SRBZ820C Vacuum Transfer Robot
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