- Vacuum chamber
- Cluster tool
- Direct-drive motor
- Expanded I/O
- Safety zones
- Collision protection
Açıklama
The SIASUN SM11 Vacuum Robot operates inside vacuum chambers and cluster-tool architectures. Engineered for contamination control, repeatability, and reliable cycle life.
Features direct-drive motor structure, expanded I/O module, configurable safety zones, and collision protection.
The SM11 serves semiconductor and industrial vacuum handling applications.
Contact for pricing and availability.
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