Buy SIASUN Vacuum Manipulator Phoenix Series Robot - Advanced Robotics Solution | Robotix Market
Buy SIASUN Vacuum Manipulator Phoenix Series Robot - Advanced Robotics Solution | Robotix Market
Açıklama

The SIASUN PHOENIX Series Vacuum Manipulator operates within a vacuum transfer module (VTM) or transfer chamber of a cluster tool. Moves substrates (commonly silicon wafers) between load locks and multiple process chambers.

Maintains stringent cleanliness, positioning accuracy, and uptime requirements as part of the front-end automation ecosystem.

The Phoenix Series serves semiconductor, logistics, research, and inspection applications.

Contact for pricing and availability.

Özellikler

  • VTM operation
  • Transfer chamber
  • Silicon wafers
  • Process chambers
  • Cleanliness
  • Positioning accuracy

Teknik Özellikler

  • Model: Vacuum Manipulator PHOENIX Series
  • Robot Type: Vacuum manipulator
  • Target Use: VTM cluster tool
  • Brand: SIASUN

Sektörler
  • Industrial
SIASUN

SIASUN Vacuum Manipulator Phoenix Series

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Robotic Arm

The SIASUN PHOENIX Vacuum Manipulator operates in vacuum transfer modules and cluster tools. Silicon wafer handling with stringent cleanliness and positioning accuracy.

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