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The SIASUN Vacuum Robot Archer Series transfers wafers or substrates between process chambers in clustered equipment. Designed for vacuum environments with repeatable motion and high uptime.

Integrated with front-end automation modules and vacuum cluster tools to reduce particle generation and maintain clean manufacturing.

The Archer Series serves semiconductor and industrial vacuum processing applications.

Contact for pricing and availability.

Özellikler

Vacuum environment
Wafer transfer
Cluster tool integration
Repeatable motion
High uptime
Particle reduction

Teknik Özellikler

Model: Vacuum Robot Archer Series
Robot Type: Vacuum transfer
Target Use: Semiconductor processing
Brand: SIASUN

Sektörler

Industrial

SIASUN

SIASUN Vacuum Robot Archer Series

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In Stock

Robotic Arm

The SIASUN Vacuum Robot Archer Series transfers wafers in vacuum cluster tools. High-uptime automation for clean semiconductor processing environments.

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SIASUN Vacuum Robot Archer Series

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SIASUN Vacuum Robot Archer Series